Inventor
DURGIN SHERI A
US2 patents
Patents
2 patentsUS9807864B1Oct 31, 2017
Electrode, accelerator column and ion implantation apparatus including same
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6 citations67
US9558975B2Jan 31, 2017
System and method for transferring articles between vacuum and non-vacuum environments
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations26