Inventor
LAULUSA ALAN E
US2 patents
Patents
2 patentsUS5209816AMay 11, 1993
Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing
MICRON TECHNOLOGY INC268 citations97
US5271798ADec 21, 1993
Method for selective removal of a material from a wafer's alignment marks
MICRON TECHNOLOGY INC110 citations94