Inventor

NIEH SIMON K

US2 patents

Patents

2 patents

US5346600ASep 13, 1994

Plasma-enhanced magnetron-sputtered deposition of materials

HUGHES AIRCRAFT CO141 citations94

US5487922AJan 30, 1996

Surface preparation and deposition method for titanium nitride onto carbon-containing materials

HUGHES AIRCRAFT CO38 citations90