Inventor

NITTA TAKAFUMI

JP7 patents

⚠️ This page may combine multiple inventors who share the name “NITTA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

5 patents

US10720325B2Jul 21, 2020

Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC3 citations72

US9773661B2Sep 26, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations71

US10032629B2Jul 24, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations50

US10910214B2Feb 2, 2021

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations47

US10134586B2Nov 20, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC0 citations40

KOKUSAI ELECTRIC CORP

2 patents

US12494363B2Dec 9, 2025

Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations49

US10763101B2Sep 1, 2020

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations40