Inventor

KUSAKA AYAKO

JP2 patents

Patents

2 patents

US7820360B2Oct 26, 2010

Polymer compound, negative resist composition, and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD2 citations55

US7582409B2Sep 1, 2009

Negative resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD0 citations34