Inventor

OBENG YAW S

US29 patents

⚠️ This page may combine multiple inventors who share the name “OBENG YAW S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OBENG YAW S

PSILOQUEST INC

Measuring the surface properties of polishing pads using ultrasonic reflectance

Polishing pad support that improves polishing performance and longevity

Polishing pad resistant to delamination

Thermal management with filled polymeric polishing pads and applications therefor

Method of altering and preserving the surface properties of a polishing pad and specific applications therefor

Selective chemical-mechanical polishing properties of a cross-linked polymer and specific applications therefor

Method for preparing a polymer for chemical mechanical polishing

Substrate polishing device and method

Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof

Compacted polishing pads for improved chemical mechanical polishing longevity

TEXAS INSTRUMENTS INC

FUSI integration method using SOG as a sacrificial planarization layer

Method for reliably removing excess metal during metal silicide formation

FUSI integration method using SOG as a sacrificial planarization layer

FUSI integration method using SOG as a sacrificial planarization layer

Method for cleaning post-etch noble metal residues

Method of manufacturing metal silicide contacts

LUCENT TECHNOLOGIES INC

Apparatus and method for continuous delivery and conditioning of a polishing slurry

Method of planarizing a surface on a semiconductor wafer

Process for removing alkali metals from solvents used in the manufacture of semiconductor wafers

In-situ method for real time monitoring of chemical baths for transition metals with multi-channel electrodes

AGERE SYST GUARDIAN CORP

Polishing pad having a water-repellant film theron and a method of manufacture therefor

Method of improving electromigration in semiconductor device manufacturing processes

Method of fabricating an integrated circuit

AT & T CORP

Integrated circuit manufacturing

Integrated circuit fabrication

PSILOQUEST

Method of introducing organic and inorganic grafted compounds throughout a thermoplastic polishing pad using a supercritical fluid and applications therefor

Polishing pad composition and method of use

AT & T BELL LAB

Control of time-dependent haze in the manufacture of integrated circuits

NATIONAL INSTITUTE OF STANDARDS AND TECH

Authentication article and process for making same