Inventor

NAKADA SABURO

JP2 patents

Patents

2 patents

US4650698AMar 17, 1987

Method of forming a thin film of a metal or metal compound on a substrate

TOSHIBA KK25 citations89

US4597167AJul 1, 1986

Method of forming a metal film on a selectively diffused layer

TOSHIBA KK10 citations70