Inventor

SHIBUYA YOHSUKE

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SHIBUYA YOHSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

2 patents

US9437702B2Sep 6, 2016

Electronic component manufacturing method and electrode structure

CANON ANELVA CORP0 citations37

US9928998B2Mar 27, 2018

Sputtering apparatus

CANON ANELVA CORP0 citations34

WAKAYANAGI SHUNICHI

1 patent

US8835296B2Sep 16, 2014

Electronic component manufacturing method including step of embedding metal film

WAKAYANAGI SHUNICHI3 citations53

SHIBUYA YOHSUKE

1 patent

US8252118B2Aug 28, 2012

Substrate support device and plasma processing apparatus

SHIBUYA YOHSUKE4 citations51