Inventor
FLAITZ PHILIP LEE
US3 patents
Patents
3 patentsUS6046487AApr 4, 2000
Shallow trench isolation with oxide-nitride/oxynitride liner
IBM169 citations96
US5763315AJun 9, 1998
Shallow trench isolation with oxide-nitride/oxynitride liner
IBM199 citations96
US6410399B1Jun 25, 2002
Process to lower strap, wordline and bitline contact resistance in trench-based DRAMS by silicidization
IBM15 citations83