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Inventor
MOSEMAN JAMES F
US
4 patents
⚠️ This page may combine multiple inventors who share the name “MOSEMAN JAMES F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
2 patents
US6046487A
Apr 4, 2000
Shallow trench isolation with oxide-nitride/oxynitride liner
IBM
169 citations
96
US5763315A
Jun 9, 1998
Shallow trench isolation with oxide-nitride/oxynitride liner
IBM
199 citations
96
SIEMENS AG
2 patents
US5747866A
May 5, 1998
Application of thin crystalline Si3 N4 liners in shallow trench isolation (STI) structures
SIEMENS AG
41 citations
94
US5643823A
Jul 1, 1997
Application of thin crystalline Si3 N4 liners in shallow trench isolation (STI) structures
SIEMENS AG
45 citations
93