Inventor
ELLISON TIMOTHY
US3 patents
Patents
3 patentsUS6186090B1Feb 13, 2001
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
ENERGY CONVERSION DEVICES INC122 citations94
US6463874B1Oct 15, 2002
Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
ENERGY CONVERSION DEVICES INC24 citations89
US6917209B2Jul 12, 2005
Non- contacting capacitive diagnostic device
ENERGY CONVERSION DEVICES INC3 citations58