Inventor

REISINGER GERD

DE6 patents

⚠️ This page may combine multiple inventors who share the name “REISINGER GERD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

4 patents

US7233386B2Jun 19, 2007

Method of optimizing imaging performance

ZEISS CARL SMT AG16 citations92

US7570345B2Aug 4, 2009

Method of optimizing imaging performance

ZEISS CARL SMT AG7 citations73

US6936825B2Aug 30, 2005

Process for the decontamination of microlithographic projection exposure devices

ZEISS CARL SMT AG8 citations68

US7605914B2Oct 20, 2009

Optical system and method for improving imaging properties thereof

ZEISS CARL SMT AG2 citations61

ZEISS CARL SMT GMBH

1 patent

US7995280B2Aug 9, 2011

Projection exposure system, beam delivery system and method of generating a beam of light

ZEISS CARL SMT GMBH14 citations80

LOERING ULRICH

1 patent

US8228483B2Jul 24, 2012

Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate

LOERING ULRICH6 citations70