Inventor

DOERING GORDON

DE3 patents

⚠️ This page may combine multiple inventors who share the name “DOERING GORDON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7301646B2Nov 27, 2007

Device and method for the determination of imaging errors and microlithography projection exposure system

ZEISS CARL SMT AG13 citations81

US7760345B2Jul 20, 2010

Method and apparatus for determining at least one optical property of an imaging optical system

ZEISS CARL SMT AG1 citations45

LOERING ULRICH

1 patent

US8228483B2Jul 24, 2012

Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate

LOERING ULRICH6 citations70