Inventor
ZHI FAN
CN3 patents
Patents
3 patentsUS9791789B2Oct 17, 2017
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations49
US9904183B2Feb 27, 2018
Coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations39
US9995569B2Jun 12, 2018
Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stage
UNIV TSINGHUA0 citations38