Inventor
ZHAO YANPO
CN3 patents
Patents
3 patentsUS9903704B2Feb 27, 2018
Three-DOF heterodyne grating interferometer displacement measurement system
UNIV TSINGHUA2 citations71
US9791789B2Oct 17, 2017
Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations49
US9904183B2Feb 27, 2018
Coarse motion and fine motion integrated reticle stage driven by planar motor
UNIV TSINGHUA0 citations39