Inventor
KUDO JIN
JP6 patents
Patents
6 patentsUS10600654B2Mar 24, 2020
Etching process method
TOKYO ELECTRON LTD3 citations71
US10692729B2Jun 23, 2020
Etching process method
TOKYO ELECTRON LTD2 citations70
US11342167B2May 24, 2022
Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US9147580B2Sep 29, 2015
Plasma etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
US10714320B2Jul 14, 2020
Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US10361070B2Jul 23, 2019
Method of processing target object
TOKYO ELECTRON LTD0 citations38