Inventor
FISK II LARRY J
US14 patents
Patents
14 patentsUS10049857B2Aug 14, 2018
Adaptive periodic waveform controller
MKS INSTR INC47 citations97
US9947514B2Apr 17, 2018
Plasma RF bias cancellation system
MKS INSTR INC42 citations93
US8040068B2Oct 18, 2011
Radio frequency power control system
MKS INSTR INC140 citations93
US10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC40 citations92
US8952765B2Feb 10, 2015
System and methods of bimodal automatic power and frequency tuning of RF generators
MKS INSTR INC40 citations92
US8736377B2May 27, 2014
RF pulse edge shaping
MKS INSTR INC24 citations91
US10217609B2Feb 26, 2019
Adaptive periodic waveform controller
MKS INSTR INC19 citations90
US11935726B2Mar 19, 2024
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC6 citations84
US11158488B2Oct 26, 2021
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC13 citations84
US9136093B2Sep 15, 2015
Synchronization of RF pulsing with RF metrology, processing, and control
MKS INSTR INC9 citations84
US11536755B2Dec 27, 2022
System and method for arc detection using a bias RF generator signal
MKS INSTR INC13 citations83
US10727027B2Jul 28, 2020
Adaptive periodic waveform controller
MKS INSTR INC1 citations72
US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC3 citations71
US11367592B2Jun 21, 2022
Adaptive periodic waveform controller
MKS INSTR INC0 citations62