Inventor

STEINHARDT HEINZ

DE3 patents

⚠️ This page may combine multiple inventors who share the name “STEINHARDT HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SECON HALBLEITERPRODUKTIONSGER

1 patent

US5489362AFeb 6, 1996

Method for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energy

SECON HALBLEITERPRODUKTIONSGER33 citations86

R3T RAPID REACTIVE RADICALS TE

1 patent

US6706141B1Mar 16, 2004

Device to generate excited/ionized particles in a plasma

R3T RAPID REACTIVE RADICALS TE15 citations77

R3T GMBH RAPID REACTIVE RADICA

1 patent

US7665416B2Feb 23, 2010

Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles

R3T GMBH RAPID REACTIVE RADICA0 citations38