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Inventor

LEE GREGORY C

US7 patents
⚠️ This page may combine multiple inventors who share the name “LEE GREGORY C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APLEX INC

3 patents
US6000997ADec 14, 1999

Temperature regulation in a CMP process

APLEX INC101 citations95
US6042457AMar 28, 2000

Conditioner assembly for a chemical mechanical polishing apparatus

APLEX INC28 citations89
US6159083ADec 12, 2000

Polishing head for a chemical mechanical polishing apparatus

APLEX INC14 citations71

LAM RES CORP

2 patents
US6517426B2Feb 11, 2003

Composite polishing pad for chemical-mechanical polishing

LAM RES CORP88 citations96
US6988934B1Jan 24, 2006

Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system

LAM RES CORP7 citations72

MOSEL VITELIC INC

2 patents
US6315857B1Nov 13, 2001

Polishing pad shaping and patterning

MOSEL VITELIC INC42 citations89
US6322429B1Nov 27, 2001

Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus

MOSEL VITELIC INC2 citations60