Inventor

LIM JUNG-SU

KR2 patents

Patents

2 patents

US6454563B1Sep 24, 2002

Wafer treatment chamber having thermal reflector

SAMSUNG ELECTRONICS CO LTD5 citations48

US6015758AJan 18, 2000

Method of stripping a wafer of its film with gas injected into a CVD apparatus in which the wafer is disposed

SAMSUNG ELECTRONICS CO LTD1 citations48