Inventor
CHEN JINGQIU
US2 patents
Patents
2 patentsUS8002611B2Aug 23, 2011
Chemical mechanical polishing pad having improved groove pattern
TEXAS INSTRUMENTS INC5 citations57
US7871931B2Jan 18, 2011
Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same
TEXAS INSTRUMENTS INC0 citations48