Inventor

HETTICH CHRISTIAN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HETTICH CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DIECKMANN NILS

2 patents

US9116441B2Aug 25, 2015

Illumination system of a microlithographic projection exposure apparatus

DIECKMANN NILS0 citations47

US8169594B2May 1, 2012

Illumination system of a microlithographic projection exposure apparatus

DIECKMANN NILS0 citations47

ZEISS CARL SMT GMBH

1 patent

US8786849B2Jul 22, 2014

Method for measuring an optical system

ZEISS CARL SMT GMBH2 citations61