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Inventor
HSEIH JUI FU
TW
2 patents
Patents
2 patents
US11282944B2
Mar 22, 2022
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD
5 citations
81
US9646871B2
May 9, 2017
Semiconductor structure with shallow trench isolation and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD
4 citations
71