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Inventor
CHEN CHUNG-YIH
TW
2 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHUNG-YIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
1 patent
US7601404B2
Oct 13, 2009
Method for switching decoupled plasma nitridation processes of different doses
UNITED MICROELECTRONICS CORP
4 citations
59
MOSEL VITELIC INC
1 patent
US6365524B1
Apr 2, 2002
Method for making a concave bottom oxide within a trench
MOSEL VITELIC INC
3 citations
54