Inventor
OISHI KOTARO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OISHI KOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10192758B2Jan 29, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9805957B2Oct 31, 2017
Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program
TOKYO ELECTRON LTD0 citations51
US9865452B2Jan 9, 2018
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46