Inventor

KAMATH ARAVIND MIYAR

US3 patents

Patents

3 patents

US10892180B2Jan 12, 2021

Lift pin assembly

APPLIED MATERIALS INC16 citations82

US12112890B2Oct 8, 2024

Top magnets for decreased non-uniformity in PVD

APPLIED MATERIALS INC0 citations59

US10134615B2Nov 20, 2018

Substrate support with improved RF return

APPLIED MATERIALS INC0 citations50