Inventor
HAYASHI YUTAKA
JP159 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHI YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
13 patentsUS6633364B2Oct 14, 2003
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP577 citations99
US6036162AMar 14, 2000
Vibration isolator and method of isolating vibration
NIKON CORP147 citations99
US6426790B1Jul 30, 2002
Stage apparatus and holder, and scanning exposure apparatus and exposure apparatus
NIKON CORP110 citations98
US6327024B1Dec 4, 2001
Vibration isolation apparatus for stage
NIKON CORP110 citations98
US6252234B1Jun 26, 2001
Reaction force isolation system for a planar motor
NIKON CORP55 citations96
US5959732ASep 28, 1999
Stage apparatus and a stage control method
NIKON CORP46 citations96
US5991005ANov 23, 1999
Stage apparatus and exposure apparatus having the same
NIKON CORP70 citations95
US6495934B1Dec 17, 2002
Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus
NIKON CORP40 citations93
US6388733B1May 14, 2002
Exposure apparatus with an anti-vibration structure
NIKON CORP37 citations93
US5828573AOct 27, 1998
Manufacturing method for microlithography apparatus
NIKON CORP21 citations93
US5770899AJun 23, 1998
Linear motor
NIKON CORP38 citations93
US5015866AMay 14, 1991
Stage apparatus in exposing apparatus
NIKON CORP38 citations93
US6961113B1Nov 1, 2005
Exposure method and apparatus
NIKON CORP29 citations92
SONY CORP
13 patentsUS5999444ADec 7, 1999
Nonvolatile semiconductor memory device and writing and erasing method of the same
SONY CORP353 citations99
US5506436AApr 9, 1996
Semiconductor memory cell
SONY CORP197 citations99
US6054734AApr 25, 2000
Non-volatile memory cell having dual gate electrodes
SONY CORP172 citations98
US5751037AMay 12, 1998
Non-volatile memory cell having dual gate electrodes
SONY CORP179 citations98
US5768184AJun 16, 1998
Performance non-volatile semiconductor memory device
SONY CORP56 citations96
US5698874ADec 16, 1997
Photoelectric cell having first and second insulated gates on first and second channel forming regions
SONY CORP70 citations96
US5627781AMay 6, 1997
Nonvolatile semiconductor memory
SONY CORP76 citations96
US5581106ADec 3, 1996
Semiconductor memory cell having information storage transistor and switching transistor
SONY CORP72 citations96
US5578853ANov 26, 1996
Semiconductor memory cell having information storage transistor and switching transistor
SONY CORP64 citations96
US5428238AJun 27, 1995
Semiconductor memory cell having information storage transistor and switching transistor
SONY CORP51 citations96
US5578852ANov 26, 1996
Semiconductor memory cell having information storage transistor and switching transistor
SONY CORP26 citations93
US5576571ANov 19, 1996
Semiconductor memory cell having information storage transistor and switching transistor
SONY CORP23 citations93
US5969564AOct 19, 1999
Insulated-gate field effect transistor and method for driving thereof
SONY CORP39 citations92
AGENCY IND SCIENCE TECHN
12 patentsUS5233211AAug 3, 1993
Semiconductor device for driving a light valve
AGENCY IND SCIENCE TECHN135 citations99
US6040200AMar 21, 2000
Method of fabricating semiconductor device having stacked-layered substrate
AGENCY IND SCIENCE TECHN37 citations96
US5926699AJul 20, 1999
Method of fabricating semiconductor device having stacked layer substrate
AGENCY IND SCIENCE TECHN55 citations96
US5759878AJun 2, 1998
Method of fabricating semiconductor device having epitaxially grown semiconductor single crystal film
AGENCY IND SCIENCE TECHN65 citations96
US5672518ASep 30, 1997
Method of fabricating semiconductor device having stacked layered substrate
AGENCY IND SCIENCE TECHN52 citations96
US5214002AMay 25, 1993
Process for depositing a thermal CVD film of Si or Ge using a hydrogen post-treatment step and an optional hydrogen pre-treatment step
AGENCY IND SCIENCE TECHN66 citations95
US4694116ASep 15, 1987
Thin-film solar cell
AGENCY IND SCIENCE TECHN55 citations94
USRE36836EAug 29, 2000
Semiconductor device for driving a light valve
AGENCY IND SCIENCE TECHN22 citations93
US4994879AFeb 19, 1991
Photoelectric transducer with light path of increased length
AGENCY IND SCIENCE TECHN43 citations93
US4757028AJul 12, 1988
Process for preparing a silicon carbide device
AGENCY IND SCIENCE TECHN114 citations93
US4950376AAug 21, 1990
Method of gas reaction process control
AGENCY IND SCIENCE TECHN39 citations92
US4616340AOct 7, 1986
Non-volatile semiconductor memory
AGENCY IND SCIENCE TECHN50 citations92
HALO LSI DESIGN & DEVICE TECH
4 patentsUS6255166B1Jul 3, 2001
Nonvolatile memory cell, method of programming the same and nonvolatile memory array
HALO LSI DESIGN & DEVICE TECH454 citations99
US6177318B1Jan 23, 2001
Integration method for sidewall split gate monos transistor
HALO LSI DESIGN & DEVICE TECH198 citations99
US6469935B2Oct 22, 2002
Array architecture nonvolatile memory and its operation methods
HALO LSI DESIGN & DEVICE TECH103 citations98
US6388293B1May 14, 2002
Nonvolatile memory cell, operating method of the same and nonvolatile memory array
HALO LSI DESIGN & DEVICE TECH220 citations96
HALO LSI DEVICE & DESIGN TECHN
1 patentNEW HALO INC
1 patentKOGYO GIZYUTSUIN
1 patentCANON DENSHI KK
1 patentHALO INC
1 patentHITACHI LTD
1 patentTOYODA MACHINE WORKS LTD
1 patentAGENCY IND SCIENCE
1 patentShowing the top 50 of 159 patents by PatentIndex Score.