Inventor

PARK MINSEOP

KR2 patents

Patents

2 patents

US11289308B2Mar 29, 2022

Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method

SAMSUNG ELECTRONICS CO LTD1 citations51

US12145233B2Nov 19, 2024

Conditioning disk replacement apparatus and method

SAMSUNG ELECTRONICS CO LTD0 citations39