P

Inventor

XIE QI

BE98 patents
⚠️ This page may combine multiple inventors who share the name “XIE QI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

46 patents
US10361201B2Jul 23, 2019

Semiconductor structure and device formed using selective epitaxial process

ASM IP HOLDING BV412 citations99
US9905492B2Feb 27, 2018

System and method for gas-phase passivation of a semiconductor surface

ASM IP HOLDING BV361 citations99
US9558931B2Jan 31, 2017

System and method for gas-phase sulfur passivation of a semiconductor surface

ASM IP HOLDING BV478 citations99
US9245742B2Jan 26, 2016

Sulfur-containing thin films

ASM IP HOLDING BV476 citations99
US9240412B2Jan 19, 2016

Semiconductor structure and device and methods of forming same using selective epitaxial process

ASM IP HOLDING BV503 citations99
US10410943B2Sep 10, 2019

Method for passivating a surface of a semiconductor and related systems

ASM IP HOLDING BV339 citations98
US10367080B2Jul 30, 2019

Method of forming a germanium oxynitride film

ASM IP HOLDING BV375 citations98
US10032628B2Jul 24, 2018

Source/drain performance through conformal solid state doping

ASM IP HOLDING BV463 citations98
US9911676B2Mar 6, 2018

System and method for gas-phase passivation of a semiconductor surface

ASM IP HOLDING BV464 citations98
US10480064B2Nov 19, 2019

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV47 citations97
US10041166B2Aug 7, 2018

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV57 citations97
US9803277B1Oct 31, 2017

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV87 citations97
US10847361B2Nov 24, 2020

Selective deposition of aluminum and nitrogen containing material

ASM IP HOLDING BV16 citations94
US10793946B1Oct 6, 2020

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV17 citations94
US10566185B2Feb 18, 2020

Selective deposition of aluminum and nitrogen containing material

ASM IP HOLDING BV22 citations94
US10903113B2Jan 26, 2021

Selective deposition of aluminum and nitrogen containing material

ASM IP HOLDING BV16 citations93
US10553482B2Feb 4, 2020

Selective deposition of aluminum and nitrogen containing material

ASM IP HOLDING BV18 citations93
US10121699B2Nov 6, 2018

Selective deposition of aluminum and nitrogen containing material

ASM IP HOLDING BV23 citations93
US11295980B2Apr 5, 2022

Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

ASM IP HOLDING BV14 citations92
US9552979B2Jan 24, 2017

Cyclic aluminum nitride deposition in a batch reactor

ASM IP HOLDING BV43 citations92
US11521851B2Dec 6, 2022

Method of forming structures including a vanadium or indium layer

ASM IP HOLDING BV5 citations84
US9711396B2Jul 18, 2017

Method for forming metal chalcogenide thin films on a semiconductor device

ASM IP HOLDING BV7 citations84
US9553148B2Jan 24, 2017

Method of making a wire-based semiconductor device

ASM IP HOLDING BV10 citations84
US9478419B2Oct 25, 2016

Sulfur-containing thin films

ASM IP HOLDING BV7 citations84
US9461134B1Oct 4, 2016

Method for forming source/drain contact structure with chalcogen passivation

ASM IP HOLDING BV12 citations84
US11286558B2Mar 29, 2022

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

ASM IP HOLDING BV9 citations83
US10643904B2May 5, 2020

Methods for forming a semiconductor device and related semiconductor device structures

ASM IP HOLDING BV19 citations83
US9520562B2Dec 13, 2016

Method of making a resistive random access memory

ASM IP HOLDING BV7 citations83
US12237171B1Feb 25, 2025

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

ASM IP HOLDING BV2 citations74
US11798999B2Oct 24, 2023

Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures

ASM IP HOLDING BV1 citations73
US11581220B2Feb 14, 2023

Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

ASM IP HOLDING BV4 citations73
US11101370B2Aug 24, 2021

Method of forming a germanium oxynitride film

ASM IP HOLDING BV2 citations73
US11056344B2Jul 6, 2021

Layer forming method

ASM IP HOLDING BV3 citations73
US10199213B2Feb 5, 2019

Sulfur-containing thin films

ASM IP HOLDING BV2 citations73
US9741815B2Aug 22, 2017

Metal selenide and metal telluride thin films for semiconductor device applications

ASM IP HOLDING BV5 citations73
US9385164B2Jul 5, 2016

Method of making a resistive random access memory device with metal-doped resistive switching layer

ASM IP HOLDING BV4 citations73
US9012278B2Apr 21, 2015

Method of making a wire-based semiconductor device

ASM IP HOLDING BV5 citations73
US11885013B2Jan 30, 2024

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

ASM IP HOLDING BV2 citations72
US11873557B2Jan 16, 2024

Method of depositing vanadium metal

ASM IP HOLDING BV2 citations72
US11532757B2Dec 20, 2022

Deposition of charge trapping layers

ASM IP HOLDING BV2 citations72
US10607895B2Mar 31, 2020

Method for forming a semiconductor device structure comprising a gate fill metal

ASM IP HOLDING BV3 citations72
US9472757B2Oct 18, 2016

Method of making a resistive random access memory device

ASM IP HOLDING BV3 citations72
US11495459B2Nov 8, 2022

Methods for selective deposition using a sacrificial capping layer

ASM IP HOLDING BV2 citations71
US11393690B2Jul 19, 2022

Deposition method

ASM IP HOLDING BV3 citations71
US12159788B2Dec 3, 2024

Method of forming structures for threshold voltage control

ASM IP HOLDING BV2 citations69
US11898243B2Feb 13, 2024

Method of forming vanadium nitride-containing layer

ASM IP HOLDING BV2 citations69

HUAWEI TECH CO LTD

2 patents

MACHKAOUTSAN VLADIMIR

1 patent

TEMASEK LIFE SCIENCES LAB

1 patent

Showing the top 50 of 98 patents by PatentIndex Score.