Inventor
XIE QI
BE98 patents
⚠️ This page may combine multiple inventors who share the name “XIE QI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
46 patentsUS10361201B2Jul 23, 2019
Semiconductor structure and device formed using selective epitaxial process
ASM IP HOLDING BV412 citations99
US9905492B2Feb 27, 2018
System and method for gas-phase passivation of a semiconductor surface
ASM IP HOLDING BV361 citations99
US9558931B2Jan 31, 2017
System and method for gas-phase sulfur passivation of a semiconductor surface
ASM IP HOLDING BV478 citations99
US9245742B2Jan 26, 2016
Sulfur-containing thin films
ASM IP HOLDING BV476 citations99
US9240412B2Jan 19, 2016
Semiconductor structure and device and methods of forming same using selective epitaxial process
ASM IP HOLDING BV503 citations99
US10410943B2Sep 10, 2019
Method for passivating a surface of a semiconductor and related systems
ASM IP HOLDING BV339 citations98
US10367080B2Jul 30, 2019
Method of forming a germanium oxynitride film
ASM IP HOLDING BV375 citations98
US10032628B2Jul 24, 2018
Source/drain performance through conformal solid state doping
ASM IP HOLDING BV463 citations98
US9911676B2Mar 6, 2018
System and method for gas-phase passivation of a semiconductor surface
ASM IP HOLDING BV464 citations98
US10480064B2Nov 19, 2019
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV47 citations97
US10041166B2Aug 7, 2018
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV57 citations97
US9803277B1Oct 31, 2017
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV87 citations97
US10847361B2Nov 24, 2020
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV16 citations94
US10793946B1Oct 6, 2020
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV17 citations94
US10566185B2Feb 18, 2020
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV22 citations94
US10903113B2Jan 26, 2021
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV16 citations93
US10553482B2Feb 4, 2020
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV18 citations93
US10121699B2Nov 6, 2018
Selective deposition of aluminum and nitrogen containing material
ASM IP HOLDING BV23 citations93
US11295980B2Apr 5, 2022
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV14 citations92
US9552979B2Jan 24, 2017
Cyclic aluminum nitride deposition in a batch reactor
ASM IP HOLDING BV43 citations92
US11521851B2Dec 6, 2022
Method of forming structures including a vanadium or indium layer
ASM IP HOLDING BV5 citations84
US9711396B2Jul 18, 2017
Method for forming metal chalcogenide thin films on a semiconductor device
ASM IP HOLDING BV7 citations84
US9553148B2Jan 24, 2017
Method of making a wire-based semiconductor device
ASM IP HOLDING BV10 citations84
US9478419B2Oct 25, 2016
Sulfur-containing thin films
ASM IP HOLDING BV7 citations84
US9461134B1Oct 4, 2016
Method for forming source/drain contact structure with chalcogen passivation
ASM IP HOLDING BV12 citations84
US11286558B2Mar 29, 2022
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
ASM IP HOLDING BV9 citations83
US10643904B2May 5, 2020
Methods for forming a semiconductor device and related semiconductor device structures
ASM IP HOLDING BV19 citations83
US9520562B2Dec 13, 2016
Method of making a resistive random access memory
ASM IP HOLDING BV7 citations83
US12237171B1Feb 25, 2025
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations74
US11798999B2Oct 24, 2023
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
ASM IP HOLDING BV1 citations73
US11581220B2Feb 14, 2023
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
ASM IP HOLDING BV4 citations73
US11101370B2Aug 24, 2021
Method of forming a germanium oxynitride film
ASM IP HOLDING BV2 citations73
US11056344B2Jul 6, 2021
Layer forming method
ASM IP HOLDING BV3 citations73
US10199213B2Feb 5, 2019
Sulfur-containing thin films
ASM IP HOLDING BV2 citations73
US9741815B2Aug 22, 2017
Metal selenide and metal telluride thin films for semiconductor device applications
ASM IP HOLDING BV5 citations73
US9385164B2Jul 5, 2016
Method of making a resistive random access memory device with metal-doped resistive switching layer
ASM IP HOLDING BV4 citations73
US9012278B2Apr 21, 2015
Method of making a wire-based semiconductor device
ASM IP HOLDING BV5 citations73
US11885013B2Jan 30, 2024
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations72
US11873557B2Jan 16, 2024
Method of depositing vanadium metal
ASM IP HOLDING BV2 citations72
US11532757B2Dec 20, 2022
Deposition of charge trapping layers
ASM IP HOLDING BV2 citations72
US10607895B2Mar 31, 2020
Method for forming a semiconductor device structure comprising a gate fill metal
ASM IP HOLDING BV3 citations72
US9472757B2Oct 18, 2016
Method of making a resistive random access memory device
ASM IP HOLDING BV3 citations72
US11495459B2Nov 8, 2022
Methods for selective deposition using a sacrificial capping layer
ASM IP HOLDING BV2 citations71
US11393690B2Jul 19, 2022
Deposition method
ASM IP HOLDING BV3 citations71
US12159788B2Dec 3, 2024
Method of forming structures for threshold voltage control
ASM IP HOLDING BV2 citations69
US11898243B2Feb 13, 2024
Method of forming vanadium nitride-containing layer
ASM IP HOLDING BV2 citations69
HUAWEI TECH CO LTD
2 patentsMACHKAOUTSAN VLADIMIR
1 patentTEMASEK LIFE SCIENCES LAB
1 patentShowing the top 50 of 98 patents by PatentIndex Score.