Inventor
GIVENS MICHAEL EUGENE
US38 patents
Patents
38 patentsUS10229833B2Mar 12, 2019
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
ASM IP HOLDING BV413 citations99
US10087522B2Oct 2, 2018
Deposition of metal borides
ASM IP HOLDING BV464 citations99
US9558931B2Jan 31, 2017
System and method for gas-phase sulfur passivation of a semiconductor surface
ASM IP HOLDING BV478 citations99
US10734497B2Aug 4, 2020
Methods for forming a semiconductor device structure and related semiconductor device structures
ASM IP HOLDING BV279 citations98
US10410943B2Sep 10, 2019
Method for passivating a surface of a semiconductor and related systems
ASM IP HOLDING BV339 citations98
US10367080B2Jul 30, 2019
Method of forming a germanium oxynitride film
ASM IP HOLDING BV375 citations98
US10032628B2Jul 24, 2018
Source/drain performance through conformal solid state doping
ASM IP HOLDING BV463 citations98
US11521851B2Dec 6, 2022
Method of forming structures including a vanadium or indium layer
ASM IP HOLDING BV5 citations84
US11145506B2Oct 12, 2021
Selective passivation and selective deposition
ASM IP HOLDING BV12 citations84
US9711396B2Jul 18, 2017
Method for forming metal chalcogenide thin films on a semiconductor device
ASM IP HOLDING BV7 citations84
US11608557B2Mar 21, 2023
Simultaneous selective deposition of two different materials on two different surfaces
ASM IP HOLDING BV6 citations83
US9981286B2May 29, 2018
Selective formation of metal silicides
ASM IP HOLDING BV11 citations81
US11965238B2Apr 23, 2024
Selective deposition of metal oxides on metal surfaces
ASM IP HOLDING BV3 citations74
US11798999B2Oct 24, 2023
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
ASM IP HOLDING BV1 citations73
US11164955B2Nov 2, 2021
Methods for forming a semiconductor device structure and related semiconductor device structures
ASM IP HOLDING BV1 citations73
US11101370B2Aug 24, 2021
Method of forming a germanium oxynitride film
ASM IP HOLDING BV2 citations73
US10865475B2Dec 15, 2020
Deposition of metal borides and silicides
ASM IP HOLDING BV2 citations73
US10720331B2Jul 21, 2020
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
ASM IP HOLDING BV2 citations73
US9741815B2Aug 22, 2017
Metal selenide and metal telluride thin films for semiconductor device applications
ASM IP HOLDING BV5 citations73
US11830732B2Nov 28, 2023
Selective passivation and selective deposition
ASM IP HOLDING BV2 citations72
US10607895B2Mar 31, 2020
Method for forming a semiconductor device structure comprising a gate fill metal
ASM IP HOLDING BV3 citations72
US11227763B2Jan 18, 2022
Methods for depositing a hafnium lanthanum oxide film on a substrate by a cyclical deposition process in a reaction chamber
ASM IP HOLDING BV2 citations68
US12563983B2Feb 24, 2026
Method of forming structures including a vanadium or indium layer
ASM IP HOLDING BV0 citations62
US12482648B2Nov 25, 2025
Selective passivation and selective deposition
ASM IP HOLDING BV0 citations62
US12166099B2Dec 10, 2024
Methods for forming a semiconductor device structure and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US12094936B2Sep 17, 2024
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11695054B2Jul 4, 2023
Methods for forming a semiconductor device structure and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US11411088B2Aug 9, 2022
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
ASM IP HOLDING BV0 citations62
US12322593B2Jun 3, 2025
Selective passivation and selective deposition
ASM IP HOLDING BV0 citations61
US11664222B2May 30, 2023
Atomic layer deposition of indium gallium zinc oxide
ASM IP HOLDING BV0 citations61
US12540387B2Feb 3, 2026
Simultaneous selective deposition of two different materials on two different surfaces
ASM IP HOLDING BV0 citations60
US11769664B2Sep 26, 2023
Methods for depositing a hafnium lanthanum oxide film on a substrate by a cyclical deposition process in a reaction chamber
ASM IP HOLDING BV0 citations57
US10818758B2Oct 27, 2020
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
ASM IP HOLDING BV0 citations52
US10665452B2May 26, 2020
Source/drain performance through conformal solid state doping
ASM IP HOLDING BV0 citations52
US12543516B2Feb 3, 2026
Methods of forming silicon germanium structures
ASM IP HOLDING BV0 citations51
US12169361B2Dec 17, 2024
Substrate processing apparatus and method
ASM IP HOLDING BV0 citations48
US11735422B2Aug 22, 2023
Method of forming a photoresist underlayer and structure including same
ASM IP HOLDING BV0 citations45
US12428723B2Sep 30, 2025
Method of forming a layer comprising magnesium, aluminum, and zinc, and related solids and systems
ASM IP HOLDING BV0 citations38