Inventor

JIN YANSHA

US3 patents

Patents

3 patents

US12581917B2Mar 17, 2026

Matching pre-processing and post-processing substrate samples

LAM RES CORP0 citations48

US10020183B1Jul 10, 2018

Edge roughness reduction

LAM RES CORP0 citations47

US11037784B2Jun 15, 2021

Amorphous carbon layer opening process

LAM RES CORP0 citations40