Inventor
BLANQUART TIMOTHEE
JP21 patents
Patents
21 patentsUS10269558B2Apr 23, 2019
Method of forming a structure on a substrate
ASM IP HOLDING BV427 citations98
US10032628B2Jul 24, 2018
Source/drain performance through conformal solid state doping
ASM IP HOLDING BV463 citations98
US11251035B2Feb 15, 2022
Method of forming a structure on a substrate
ASM IP HOLDING BV5 citations83
US11776846B2Oct 3, 2023
Methods for depositing gap filling fluids and related systems and devices
ASM IP HOLDING BV2 citations72
US10784102B2Sep 22, 2020
Method of forming a structure on a substrate
ASM IP HOLDING BV3 citations72
US12406881B2Sep 2, 2025
Methods and systems for filling a gap
ASM IP HOLDING BV1 citations63
US12550642B2Feb 10, 2026
Deposition of boron nitride films using hydrazido-based precursors
ASM IP HOLDING BV0 citations62
US12463094B2Nov 4, 2025
Multiple-layer method and system for forming material within a gap
ASM IP HOLDING BV0 citations62
US12448682B2Oct 21, 2025
Methods for selectively depositing an amorphous silicon film on a substrate
ASM IP HOLDING BV0 citations62
US12381087B2Aug 5, 2025
Methods for filling a gap and related systems and devices
ASM IP HOLDING BV0 citations62
US12341003B2Jun 24, 2025
Method and system for forming material within a gap
ASM IP HOLDING BV0 citations62
US12293942B2May 6, 2025
Methods for depositing gap filling fluids and related systems and devices
ASM IP HOLDING BV0 citations62
US11572620B2Feb 7, 2023
Methods for selectively depositing an amorphous silicon film on a substrate
ASM IP HOLDING BV1 citations62
US12104244B2Oct 1, 2024
Methods and systems for filling a gap
ASM IP HOLDING BV1 citations61
US12211742B2Jan 28, 2025
Methods for depositing gap filling fluid
ASM IP HOLDING BV1 citations59
US12424490B2Sep 23, 2025
Halogenation-based gapfill method and system
ASM IP HOLDING BV0 citations57
US10665452B2May 26, 2020
Source/drain performance through conformal solid state doping
ASM IP HOLDING BV0 citations52
US12550639B2Feb 10, 2026
Methods and systems for forming a layer comprising vanadium and nitrogen
ASM IP HOLDING BV0 citations51
US12428728B2Sep 30, 2025
Topology-selective deposition method and structure formed using same
ASM IP HOLDING BV0 citations51
US12129546B2Oct 29, 2024
Methods and apparatuses for flowable gap-fill
ASM IP HOLDING BV0 citations50
US12559837B2Feb 24, 2026
Method for depositing boron nitride
ASM IP HOLDING BV0 citations41