Inventor

OKITA HAJIME

JP2 patents

Patents

2 patents

US5000114AMar 19, 1991

Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices

MITSUBISHI HEAVY IND LTD34 citations90

US5117564AJun 2, 1992

Continuous vacuum treatment system

MITSUBISHI HEAVY IND LTD17 citations70