Inventor
GARWOOD JR GERALD A
US3 patents
Patents
3 patentsUS5313984AMay 24, 1994
Multi-fluid, variable sequence, zero dead volume valve and system
SANTA BARBARA RES CENTER41 citations88
US5402237AMar 28, 1995
Reflection-free ellipsometry measurement apparatus and method for small sample cells
SANTA BARBARA RES CENTER15 citations71
US5275690AJan 4, 1994
Method and apparatus for wet chemical processing of semiconductor wafers and other objects
SANTA BARBARA RES CENTER13 citations68