Inventor
WU MIN-CHENG
TW28 patents
⚠️ This page may combine multiple inventors who share the name “WU MIN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
27 patentsUS11550233B2Jan 10, 2023
Lithography system and operation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11409201B2Aug 9, 2022
Substrate measuring device and a method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11092892B2Aug 17, 2021
Substrate measuring device and a method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10971352B2Apr 6, 2021
Cleaning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10867824B2Dec 15, 2020
Substrate detecting system in a substrate storage container
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11852980B2Dec 26, 2023
Techniques for correction of aberrations
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12025923B2Jul 2, 2024
Lithography system and operation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12020963B2Jun 25, 2024
Method of performing a substrate detection process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12007691B2Jun 11, 2024
Substrate measuring device and a method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923187B2Mar 5, 2024
Cleaning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11923231B2Mar 5, 2024
Substrate table with vacuum channels grid
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11899378B2Feb 13, 2024
Lithography system and operation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11562898B2Jan 24, 2023
Cleaning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11409200B2Aug 9, 2022
Substrate measuring device and a method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11302566B2Apr 12, 2022
Wafer table with dynamic support pins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11269261B2Mar 8, 2022
Particle removal from wafer table and photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11217475B2Jan 4, 2022
Wafer table with dynamic support pins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11081383B2Aug 3, 2021
Substrate table with vacuum channels grid
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11016390B2May 25, 2021
Method for exposing wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10775700B2Sep 15, 2020
Lithography system and method for exposing wafer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10678146B2Jun 9, 2020
Particle removal from wafer table and photomask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10613444B2Apr 7, 2020
Semiconductor apparatus and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12443112B2Oct 14, 2025
Techniques for correction of aberrations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10811300B2Oct 20, 2020
Wafer table with dynamic support pins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10651075B2May 12, 2020
Wafer table with dynamic support pins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10522385B2Dec 31, 2019
Wafer table with dynamic support pins
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10775706B2Sep 15, 2020
Lithography apparatus and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41