Inventor
BAITINGER HENNER
DE3 patents
Patents
3 patentsUS10133183B2Nov 20, 2018
Optical component
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US9846370B2Dec 19, 2017
Support apparatus for an optical device, optical device and lithography system
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US12298674B2May 13, 2025
Connecting components of an optical imaging device
ZEISS CARL SMT GMBH0 citations34