Inventor
Perali Pavan Kumar
US4 patents
⚠️ This page may combine multiple inventors who share the name “Perali Pavan Kumar”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS11195268B2Dec 7, 2021
Target selection improvements for better design alignment
KLA TENCOR CORP0 citations58
US10304177B2May 28, 2019
Systems and methods of using z-layer context in logic and hot spot inspection for sensitivity improvement and nuisance suppression
KLA TENCOR CORP1 citations57
US11295432B2Apr 5, 2022
Broad band plasma inspection based on a nuisance map
KLA TENCOR CORP0 citations40