P

Inventor

OYABU JUN

JP7 patents
⚠️ This page may combine multiple inventors who share the name “OYABU JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US6673196B1Jan 6, 2004

Plasma processing apparatus

TOKYO ELECTRON LTD627 citations96
US6508199B1Jan 21, 2003

Plasma processing apparatus

TOKYO ELECTRON LTD24 citations90
US9524847B2Dec 20, 2016

Substrate processing apparatus

TOKYO ELECTRON LTD1 citations50

INOUE MTP KK

2 patents
US9643380B2May 9, 2017

Carbon fibre reinforced composite material and production method thereof

INOUE MTP KK4 citations70
US10086581B2Oct 2, 2018

Carbon fiber composite material

INOUE MTP KK1 citations49

WADA NOBUHIRO

1 patent
US8592319B2Nov 26, 2013

Substrate processing method and substrate processing apparatus

WADA NOBUHIRO0 citations43

OYABU JUN

1 patent
US8426318B2Apr 23, 2013

Method of setting thickness of dielectric and substrate processing apparatus having dielectric disposed in electrode

OYABU JUN0 citations33