Inventor

TANBA YUUSUKE

JP3 patents

Patents

3 patents

US6963069B2Nov 8, 2005

Charged particle beam device

HITACHI HIGH TECH CORP11 citations71

US7456403B2Nov 25, 2008

Charged particle beam device

HITACHI HIGH TECH CORP3 citations60

US7964845B2Jun 21, 2011

Charged particle beam device

HITACHI HIGH TECH CORP0 citations49