Inventor

ESCHER GARY

US2 patents

Patents

2 patents

US7560376B2Jul 14, 2009

Method for adjoining adjacent coatings on a processing element

TOKYO ELECTRON LTD42 citations88

US7291566B2Nov 6, 2007

Barrier layer for a processing element and a method of forming the same

TOKYO ELECTRON LTD20 citations88