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Inventor
MIYAJI MASAKAZU
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “MIYAJI MASAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patents
US10600619B2
Mar 24, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP
11 citations
85
US9349603B2
May 24, 2016
Plasma processing method
HITACHI HIGH TECH CORP
11 citations
83
US11658011B2
May 23, 2023
Plasma processing apparatus
HITACHI HIGH TECH CORP
0 citations
62
INOUE YOSHIHARU
2 patents
US8828254B2
Sep 9, 2014
Plasma processing method
INOUE YOSHIHARU
11 citations
82
US8801951B2
Aug 12, 2014
Plasma processing method
INOUE YOSHIHARU
2 citations
61