Inventor
KIRIKIHIRA KAORI
JP2 patents
Patents
2 patentsUS8987146B2Mar 24, 2015
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC6 citations80
US9899211B2Feb 20, 2018
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC1 citations48