Inventor
LEE JAMES FOREST
US5 patents
⚠️ This page may combine multiple inventors who share the name “LEE JAMES FOREST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS9028765B2May 12, 2015
Exhaust flow spreading baffle-riser to optimize remote plasma window clean
LAM RES CORP9 citations79
US10147597B1Dec 4, 2018
Turbulent flow spiral multi-zone precursor vaporizer
LAM RES CORP18 citations77
US11619925B2Apr 4, 2023
Remote-plasma clean (RPC) directional-flow device
LAM RES CORP2 citations70
US12013682B2Jun 18, 2024
Remote-plasma clean (RPC) directional-flow device
LAM RES CORP0 citations57