Inventor
BALDERRAMA CARMEN
US4 patents
⚠️ This page may combine multiple inventors who share the name “BALDERRAMA CARMEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS9073100B2Jul 7, 2015
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC8 citations82
US10020197B2Jul 10, 2018
Method for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC2 citations71
US11177131B2Nov 16, 2021
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
NOVELLUS SYSTEMS INC0 citations59