Inventor
JANIEL PETER A
DE5 patents
Patents
5 patentsUS4965090AOct 23, 1990
Method for the plasma-activated reactive deposition of electrically conductive multicomponent material from a gas phase
PHILIPS CORP34 citations90
US4894256AJan 16, 1990
Process for glow-discharge-activated reactive deposition of metal from a gas phase
PHILIPS CORP50 citations90
US4883362ANov 28, 1989
Device for enriching a carrier gas with the vapor of a sparingly volatile substance
PHILIPS CORP40 citations90
US4713259ADec 15, 1987
Method for the glow-discharge-activated reactive deposition of electrically conductive material from a gaseous phase
PHILIPS CORP13 citations71
US4659591AApr 21, 1987
Method of coating tungsten preferentially orientated in the <111> direction on a substrate
PHILIPS CORP4 citations60