Inventor
HALPIN MICHAEL
US10 patents
⚠️ This page may combine multiple inventors who share the name “HALPIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
7 patentsUS9299595B2Mar 29, 2016
Susceptor heater and method of heating a substrate
ASM IP HOLDING BV506 citations98
US9005539B2Apr 14, 2015
Chamber sealing member
ASM IP HOLDING BV547 citations98
US9340874B2May 17, 2016
Chamber sealing member
ASM IP HOLDING BV19 citations92
US10683571B2Jun 16, 2020
Gas supply manifold and method of supplying gases to chamber using same
ASM IP HOLDING BV8 citations81
US9167625B2Oct 20, 2015
Radiation shielding for a substrate holder
ASM IP HOLDING BV5 citations73
US11088015B2Aug 10, 2021
Apparatus for adjusting a pedestal assembly for a reactor
ASM IP HOLDING BV3 citations72
US10186450B2Jan 22, 2019
Apparatus and method for adjusting a pedestal assembly for a reactor
ASM IP HOLDING BV0 citations51