Inventor
CASTENMILLER THOMAS JOSEPHUS MARIA
NL5 patents
Patents
5 patentsUS7525638B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations81
US7564536B2Jul 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations72
US7655367B2Feb 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US7595863B2Sep 29, 2009
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations69
US7675607B2Mar 9, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61