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Inventor
LEPPACK SUSANNE
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “LEPPACK SUSANNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BARTSCH CHRISTIN
1 patent
US8664115B2
Mar 4, 2014
Copper interconnect with metal hardmask removal
BARTSCH CHRISTIN
2 citations
50
SCHALLER MATTHIAS
1 patent
US8110498B2
Feb 7, 2012
Method for passivating exposed copper surfaces in a metallization layer of a semiconductor device
SCHALLER MATTHIAS
0 citations
35