Inventor
MARUYAMA NATSUKO
JP2 patents
Patents
2 patentsUS7927780B2Apr 19, 2011
Resist composition, method of forming resist pattern, novel compound and method of producing the same, and acid generator
TOKYO OHKA KOGYO CO LTD9 citations83
US8367297B2Feb 5, 2013
Resist composition, method of forming resist pattern, novel compound and acid generator
TOKYO OHKA KOGYO CO LTD3 citations60