Inventor

RAJ DEVEN M

US2 patents

⚠️ This page may combine multiple inventors who share the name “RAJ DEVEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US7586100B2Sep 8, 2009

Closed loop control and process optimization in plasma doping processes using a time of flight ion detector

VARIAN SEMICONDUCTOR EQUIPMENT35 citations89

PAPASOULIOTIS GEORGE

1 patent

US8728587B2May 20, 2014

Closed loop process control of plasma processed materials

PAPASOULIOTIS GEORGE0 citations38